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Methods of artificial intelligence in the software management system for critical sizes control equipment on the basis of computer vision
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UDC: 004.93'1
Publication Language: Russian
Stuc. intelekt. 2018; 23(4):39-45
Abstract: In this paper the functional requirements and the structure of software control system for equipment of critical sizes inspection on the basis of computer vision are described. The artificial intelligence methods including Network-in-Network type neural networks and deep learning were applied for solving problems of analyzing images. The advantages of the architecture of Network-in-Network are considered. Application of Network-in- Network technology allows identifying effectively defects that is especially important for software engineering for equipment of critical sizes inspection of VLSI manufacturing based on submicron technology.
Keywords: neural networks, VLSI, NiN, Computer Vision
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