Artificial intelligence

Scientific journal

ISSN 2710-1673

ONLINE: ISSN 2710-1681

Search by:

Year of publication
Author name
Paper title

Моделювання процесів фотолітографії на суперкомп’ютері СКІФ К-1000

Doudkin A.1, Inyutin A.2, Otwagin O.2
1 United Institute of Informatics Problems of the National Academy of Sciences of Belarus
2 United Institute of Informatics Problems of the National Academy of Sciences of Belarus

Full text (PDF)

UDC: 535.317:004.22
Publication Language: Russian
Stuc. intelekt. 2008; 13(4):348-352

Abstract: The parallel realization of modeling of photolithography processes was developed for application on supercomputer SKIF К-1000. Parallel means of calculation have allowed accelerating of image generation process in a photoresist layer and the subsequent automatic mask inspection.

Keywords:

References:

View full text (PDF)